专利名称：Detecting device
发明人：Yoshii, Minoru, c/o Canon Kabushiki
Kaisha,Nose, Hiroyasu, c/o Canon KabushikiKaisha,Takeuchi, Seiji, c/o Canon KabushikiKaisha
申请号：EP93101334.6申请日：19930128公开号：EP0553826B1公开日：19980401
摘要：A device for detecting the displacement of an object is provided with asemiconductor laser having an active layer for emitting laser beams in two directions,mirrors for directing the laser beams toward a diffraction grating provided on the object,and a detector for receiving the interfering lights diffracted by the diffraction grating.The active layer of the semiconductor laser is arranged substantially parallel to thediffraction grating, to save space, also to enable light deflection such that the spreadingdirection of the light beams from the semiconductor laser coincides with the direction ofpitch of the diffraction grating. The diffraction grating is irradiated with an improvedefficiency, giving diffracted lights with higher intensity to the detector and improving theS/N ratio of detection. The space between the semiconductor laser and the object isreduced, thus reducing the entire volume of system.
申请人：CANON KK
地址：JP
国籍：JP
代理机构：Tiedtke, Harro, Dipl.-Ing.
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