Dual exhaust controller

专利名称：Dual exhaust controller

发明人：Paul L. Knutson,Benjamin Garcia Rodriguez申请号：US08/758163申请日：19961125公开号：US05826607A公开日：19981027

摘要：A dual exhaust controller for maintaining isolation between the flows of twodifferent gases in a chamber. The controller includes first and second gas input valvesconnected between respective first and second sources of different gases and aprocessing chamber. A pump is fluidly connected to the chamber for exhausting gasestherefrom and has first and second gas exhaust valves connected to an outlet of thepump. A gas flow control interlocks the signals operating the gas input valves with thestates of first and second gas exhaust valves which exhaust the respective first andsecond gases from the chamber, so that the different gases are exhaustedindependently.

申请人：SONY CORPORATION,SONY ELECTRONICS INC.

代理机构：Wood, Herron & Evans, LP.

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