REFRACTIVE INDEX MEASUREMENT METHOD, REFRACTIVE IN

专利名称：REFRACTIVE INDEX MEASUREMENT

METHOD, REFRACTIVE INDEX

MEASUREMENT APPARATUS, AND OPTICALELEMENT MANUFACTURING METHOD

发明人：Tomohiro Sugimoto申请号：US15484813申请日：20170411

公开号：US20170315053A1公开日：20171102

摘要：A refractive index measurement method uses an interference optical systemwhich divides light from a light source having a plurality of discrete wavelengths into testlight and reference light, causes the test light transmitted through the target tointerfere with the reference light, and detect the interference light. The refractive indexmeasurement method determines a first optical delay amount of the interference opticalsystem so that a first and a second wavelength become adjacent to a wavelength

corresponding to an extremal value of a phase of the interference light, measures phasesof interference light at the first and second wavelengths at the first optical delay amount,and calculates a phase difference between a plurality of the discrete wavelengths at apredetermined optical delay amount using the first optical delay amount, the phases ofthe interference light at the first and second wavelengths to calculate the refractiveindex of the target.

申请人：CANON KABUSHIKI KAISHA

地址：Tokyo JP

国籍：JP

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