STRUCTURE AND METHOD OF FABRICATION FOR AN OPTICAL

专利名称：STRUCTURE AND METHOD OF

FABRICATION FOR AN OPTICAL SWITCH

发明人：Aroon Tungare,Keryn Lian,Robert

Lempkowski,Barbara Foley Barenburg

申请号：US09911492申请日：20010725

公开号：US20030021520A1公开日：20030130

专利附图：

摘要：A structure for an optical switch includes a reflective layer formed over a highquality epitaxial layer of piezoelectric compound semiconductor materials grown over a

monocrystalline substrate, such as a silicon wafer. The piezoelectric layer can be activatedto alter the path of light incident on the reflective layer. A compliant substrate isprovided for growing the monocrystalline compound semiconductor layer. Anaccommodating buffer layer comprises a layer of monocrystalline oxide spaced apartfrom a silicon wafer by an amorphous interface layer of silicon oxide. The amorphousinterface layer dissipates strain and permits the growth of a high quality monocrystallineoxide accommodating buffer layer. The accommodating buffer layer is lattice matched toboth the underlying silicon wafer and the overlying piezoelectric monocrystallinematerial layer.

申请人：MOTOROLA, INC.

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