专利名称：MEASUREMENT APPARATUS, SYSTEM,
MEASUREMENT METHOD, DETERMINATIONMETHOD, AND NON-TRANSITORYCOMPUTER-READABLE STORAGE MEDIUM
发明人：Akihiro Yamada申请号：US15371538申请日：20161207
公开号：US20170169581A1公开日：20170615
专利附图：
摘要：The present invention provides a measurement apparatus for measuring at
least one of a position and an attitude of a work using an image obtained by capturingthe work onto which pattern light having periodically arrayed lines is projected, includinga determination unit configured to determine, based on luminance information about aperiod direction of luminance unevenness generated, due to periodic shape unevennessof the work, in the image obtained by an image capturing unit, a base-line directiondefined by a relative tilt direction between an optical axis of a projection unit and anoptical axis of the image capturing unit with respect to the work so that a period
direction of the pattern light is different from a period direction of the shape unevennessof the work.
申请人：CANON KABUSHIKI KAISHA
地址：Tokyo JP
国籍：JP
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