专利名称：SUBSTRATE PROCESSING SYSTEM发明人：Andrea Baccini,Marco Galiazzo,Tommaso
Vercesi
申请号：US13382043申请日：20091002
公开号：US20120109355A1公开日：20120503
专利附图：
摘要：Embodiments of the present invention provide an apparatus and method forprocessing substrates in a processing system that has an increased system throughput,improved system uptime, and improved device yield performance, while maintaining a
repeatable and accurate substrate processing. The system may include multipleprocessing nests laterally positionable by use of a planar motor via multiple planarmovers controlled by a system controller. A substrate supported by each processingnest may be angularly positionable by a rotary actuator. The system may be used inscreen printing, ink jet printing, thermal processing, device testing, and material removalprocesses, among others.
申请人：Andrea Baccini,Marco Galiazzo,Tommaso Vercesi
地址：Mignagola Di Carbonera IT,Padova IT,Silea IT
国籍：IT,IT,IT
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容