MULTIPLE AXIS ACCELERATION SENSOR

专利名称：MULTIPLE AXIS ACCELERATION SENSOR发明人：MEMISHIAN, JOHN申请号：US2005029066申请日：20050816

公开号：WO2006023476A8公开日：20070426

摘要：One or more fixed sensing electrodes are employed to sense movement of amass both within the plane of the mass/electrodes and along an axis normal to thatplane. In order to measure movement of the mass along the axis normal to the plane, areference capacitance is measured between the fixed sensing electrode(s) and anunderlying conducting plane and a measurement capacitance is measured between themass and the underlying conducting plane. A value Cv-KCf may be computed, where Cf isthe reference capacitance, Cv is the measurement capacitance, and K is a predeterminedconstant. In accordance with certain embodiments of the invention, a standard one or twoaxis acceleration sensor that measures movement of the mass within the plane can beused to also measure movement of the mass in the axis normal to the plane.

申请人：ANALOG DEVICES, INC.,MEMISHIAN, JOHN

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