专利名称：METHOD FOR MANUFACTURING METAL
FOIL PROVIDED WITH ELECTRICALRESISTANCE LAYER
发明人：Toshio Kurosawa申请号：US14008109申请日：20120328
公开号：US20140014498A1公开日：20140116
摘要：The present invention provides a method for producing a metal foil with anelectric resistance layer which can stably obtain electric characteristics of a resistiveelement, suppress peeling between the metal foil and the electric resistance layerdisposed on the metal foil, and realize a high sheet resistance value and the methodincludes forming an electric resistance layer on a metal foil having a 10-point averageroughness Rz, which is measured by the optical method according to 1 μm or less andwhose surface is treated by irradiation with ion beams at an ion beam intensity of 0.70 to2.10 sec·W/cmby vapor deposition while applying oxygen as an atmospheric gas using asputtering target containing nickel, chromium, and silicon.
申请人：Toshio Kurosawa
地址：Hitachi-shi JP
国籍：JP
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