Displacement information measuring apparatus with

专利名称：Displacement information measuring

apparatus with hyperbolic diffraction grating

发明人：Makoto Takamiya,Hidejiro Kadowaki,Kou

Ishizuka,Yasushi Kaneda

申请号：US09333043申请日：19990615公开号：US06259531B1公开日：20010710

专利附图：

摘要：An apparatus for detecting the displacement information of an object has alight source, a diffraction grating for diffracting a light beam from the light source so that

the light beam diffracted by the diffraction grating is incident on the object, and aphotodetector for detecting the light from the object caused upon the incidence of thelight beam thereon by the diffraction grating. Information regarding the relative

displacement to the object along a predetermined direction is detected on the basis of alight detection signal from the photodetector. The diffraction grating is formed so thatthe light beam applied to the object may be condensed on the object in a direction inwhich the relative displacement to the object cannot be detected by the signal from thephotodetector.

申请人：CANON KABUSHIKI KAISHA

代理机构：Fitzpatrick, Cella, Harper & Scinto

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