专利名称：High-efficiency, multilevel, diffractive optical
elements
发明人：Gary J. Swanson,Wilfrid B. Veldkamp申请号：US08/471863申请日：19950607公开号：USRE036352E1公开日：19991026
摘要：The method utilizes high resolution lithography, mask aligning, and reactive ionetching. In particular, at least two binary amplitude masks are generated. A photoresistlayer on an optical element substrate is exposed through the first mask and then etched.The process is then repeated for the second and subsequent masks to create a multistepconfiguration. The resulting optical element is highly efficient.
申请人：MASSACHUSETTS INSTITUTE OF TECHNOLOGY
代理机构：Myers Bigel Sibley & Sajovec, P
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