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Method of fabricating a wafer level package

2024-03-08 来源:乌哈旅游
专利内容由知识产权出版社提供

专利名称:Method of fabricating a wafer level package发明人:Jong Heon Kim申请号:US10024892申请日:20011218公开号:US06699782B2公开日:20040302

专利附图:

摘要:A fabrication method of wafer level packages capable of improving reliability bymaximizing a contact area of metal wiring and a conductive ball and of simplifyingfabrication processes by reducing the number of sputtering. The disclosed methodcomprises the steps of: providing a substrate having a plurality of chip pads on the upper

part thereof; forming a first insulating layer including a first opening exposing the chippad and a second opening forming a ball land on the substrate; forming metal wiringconnected to the chip pad in a single unit through the first opening and covering thesecond opening to have a ball land on the first insulating layer; forming a second

insulating layer including a third opening which covers the metal wiring, however, exposesthe ball land; and adhering a conductive ball to be in contact with the third opening onthe ball land.

申请人:HYNIX SEMICONDUCTOR INC.

代理机构:Ladas & Parry

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