专利名称:Forming a plurality of thin-film devices发明人:Carl Philip Taussig申请号:US10895584申请日:20040721公开号:US07195950B2公开日:20070327
专利附图:
摘要:An aspect of the present invention is a method for forming a plurality of thin-film devices. The method includes coarsely patterning at least one thin-film material on aflexible substrate and forming a plurality of thin-film elements on the flexible substratewith a self-aligned imprint lithography (SAIL) process.
申请人:Carl Philip Taussig
地址:Redwood City CA US
国籍:US
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